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学科主题基础医学
Wafer-scale fabrication of high-aspect ratio nanochannels based on edge-lithography technique
Xie, Quan1,2; Zhou, Qing3,4; Xie, Fei1; Sang, Jianming3; Wang, Wei1; Zhang, Haixia Alice1; Wu, Wengang1; Li, Zhihong1
刊名BIOMICROFLUIDICS
2012-03-01
DOI10.1063/1.3683164
6期:1
收录类别SCI
文章类型Article
WOS标题词Science & Technology
类目[WOS]Biochemical Research Methods ; Biophysics ; Nanoscience & Nanotechnology ; Physics, Fluids & Plasmas
研究领域[WOS]Biochemistry & Molecular Biology ; Biophysics ; Science & Technology - Other Topics ; Physics
关键词[WOS]NANOFLUIDIC CHANNELS ; DNA ; MEMBRANES ; MOLECULES
英文摘要

This paper introduced a wafer-scale fabrication approach for the preparation of nanochannels with high-aspect ratio (the ratio of the channel depth to its width). Edge lithography was used to pattern nanogaps in an aluminum film, which was functioned as deep reactive ion etching mask thereafter to form the nanochannel. Nanochannels with aspect ratio up to 172 and width down to 44 nm were successfully fabricated on a 4-inch Si wafer with width nonuniformity less than 13.6%. A microfluidic chip integrated with nanometer-sized filters was successfully fabricated by utilizing the present method for geometric-controllable nanoparticle packing. (C) 2012 American Institute of Physics. [doi:10.1063/1.3683164]

语种英语
WOS记录号WOS:000302301000046
项目编号2009CB320300 ; 2011CB309502 ; 60976086 ; 91023045 ; 4092020
资助机构Major State Basic Research Development Program (973 Program) ; National Natural Science Foundation of China ; Beijing Natural Science Foundation
引用统计
被引频次:6[WOS]   [WOS记录]     [WOS相关记录]
文献类型期刊论文
条目标识符http://ir.bjmu.edu.cn/handle/400002259/55218
专题北京大学基础医学院
北京大学第二临床医学院_乳腺外科
作者单位1.Peking Univ, Sch Basic Med Sci, Beijing 100871, Peoples R China
2.Peking Univ, Inst Microelect, Natl Key Lab Sci & Technol Micro Nano Fabricat, Beijing 100871, Peoples R China
3.Univ Michigan, Dept Elect Engn & Comp Sci, Ann Arbor, MI 48109 USA
4.Univ Calif Davis, Dept Biomed Engn, Davis, CA 95616 USA
推荐引用方式
GB/T 7714
Xie, Quan,Zhou, Qing,Xie, Fei,et al. Wafer-scale fabrication of high-aspect ratio nanochannels based on edge-lithography technique[J]. BIOMICROFLUIDICS,2012,6(1).
APA Xie, Quan.,Zhou, Qing.,Xie, Fei.,Sang, Jianming.,Wang, Wei.,...&Li, Zhihong.(2012).Wafer-scale fabrication of high-aspect ratio nanochannels based on edge-lithography technique.BIOMICROFLUIDICS,6(1).
MLA Xie, Quan,et al."Wafer-scale fabrication of high-aspect ratio nanochannels based on edge-lithography technique".BIOMICROFLUIDICS 6.1(2012).
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