IR@PKUHSC  > 北京大学基础医学院
学科主题基础医学
Wafer-scale fabrication of high-aspect ratio nanochannels based on edge-lithography technique
Xie, Quan1,2; Zhou, Qing3,4; Xie, Fei1; Sang, Jianming3; Wang, Wei1; Zhang, Haixia Alice1; Wu, Wengang1; Li, Zhihong1
刊名BIOMICROFLUIDICS
2012-03-01
DOI10.1063/1.3683164
6期:1
收录类别SCI
文章类型Article
WOS标题词Science & Technology
类目[WOS]Biochemical Research Methods ; Biophysics ; Nanoscience & Nanotechnology ; Physics, Fluids & Plasmas
研究领域[WOS]Biochemistry & Molecular Biology ; Biophysics ; Science & Technology - Other Topics ; Physics
关键词[WOS]NANOFLUIDIC CHANNELS ; DNA ; MEMBRANES ; MOLECULES
英文摘要

This paper introduced a wafer-scale fabrication approach for the preparation of nanochannels with high-aspect ratio (the ratio of the channel depth to its width). Edge lithography was used to pattern nanogaps in an aluminum film, which was functioned as deep reactive ion etching mask thereafter to form the nanochannel. Nanochannels with aspect ratio up to 172 and width down to 44 nm were successfully fabricated on a 4-inch Si wafer with width nonuniformity less than 13.6%. A microfluidic chip integrated with nanometer-sized filters was successfully fabricated by utilizing the present method for geometric-controllable nanoparticle packing. (C) 2012 American Institute of Physics. [doi:10.1063/1.3683164]

语种英语
WOS记录号WOS:000302301000046
引用统计
被引频次:6[WOS]   [WOS记录]     [WOS相关记录]
文献类型期刊论文
条目标识符http://ir.bjmu.edu.cn/handle/400002259/55218
专题北京大学基础医学院
北京大学第二临床医学院_乳腺外科
作者单位1.Peking Univ, Sch Basic Med Sci, Beijing 100871, Peoples R China
2.Peking Univ, Inst Microelect, Natl Key Lab Sci & Technol Micro Nano Fabricat, Beijing 100871, Peoples R China
3.Univ Michigan, Dept Elect Engn & Comp Sci, Ann Arbor, MI 48109 USA
4.Univ Calif Davis, Dept Biomed Engn, Davis, CA 95616 USA
推荐引用方式
GB/T 7714
Xie, Quan,Zhou, Qing,Xie, Fei,et al. Wafer-scale fabrication of high-aspect ratio nanochannels based on edge-lithography technique[J]. BIOMICROFLUIDICS,2012,6(1).
APA Xie, Quan.,Zhou, Qing.,Xie, Fei.,Sang, Jianming.,Wang, Wei.,...&Li, Zhihong.(2012).Wafer-scale fabrication of high-aspect ratio nanochannels based on edge-lithography technique.BIOMICROFLUIDICS,6(1).
MLA Xie, Quan,et al."Wafer-scale fabrication of high-aspect ratio nanochannels based on edge-lithography technique".BIOMICROFLUIDICS 6.1(2012).
条目包含的文件
条目无相关文件。
个性服务
推荐该条目
保存到收藏夹
查看访问统计
导出为Endnote文件
谷歌学术
谷歌学术中相似的文章
[Xie, Quan]的文章
[Zhou, Qing]的文章
[Xie, Fei]的文章
百度学术
百度学术中相似的文章
[Xie, Quan]的文章
[Zhou, Qing]的文章
[Xie, Fei]的文章
必应学术
必应学术中相似的文章
[Xie, Quan]的文章
[Zhou, Qing]的文章
[Xie, Fei]的文章
相关权益政策
暂无数据
收藏/分享
所有评论 (0)
暂无评论
 

除非特别说明,本系统中所有内容都受版权保护,并保留所有权利。